Research Programs
National Nanotechnology Infrastructure Network The Georgia Tech-NNIN (GIT-NNIN) site will especially emphasize the application of nanofabrication to bioengineering and biomedicine. Much of the GIT-NNIN activity is carried out in the Microelectronics Research Center (MiRC). The MiRC is housed in its own 100,000 sq. ft. building that includes an 8,500 sq. ft. cleanroom (75% class 100, 25% class 10). The major fabrication facilities in the cleanroom include thin film deposition, plasma processing, optical and electron beam lithography (100 keV / 4nm spot size JEOL JBX 9300FS), thermal processing, electroplating, wafer lapping, polishing, dicing, bonding and sawing, wire bonding, flip chip bonding, III-V MBE growth, and a 2-metal/2-poly CMOS and MEMS line (ion implantation outsourced).
Interconnect Focus Center The goal of the proposed research is to discover new solutions that will enable the semiconductor industry to transcend interconnect limitations.
Nanolithography Georgia Tech's Microelectronics Research Center (MiRC) currently operates a JEOL JBX-9300FS 100kV electron beam lithography system. Active research projects utilizing the tool include such topics as advanced high resolution chemically amplified resists, quantum dot fabrication, t-gate patterning for high speed HEMT devices, high resolution nano-imprint embossing stamps, and high speed photo detectors.
CMOS as a Research Platform To facilitate research on a variety of new materials, device structures, and micro-electromechanical systems, the MiRC has established a silicon CMOS processing baseline and a rigorous procedure for equipment and processing training. The Platform is open to the entire Georgia Tech community and to other research communities around the world. The Platform consists of four integrated components: Baselines, Research, Training, and Services - each supported and maintained by the Microelectronic Research Center's CMOS Group. In the future, baselines will also include:
- A complete 1 micron, twin-well, double metal, double poly technology
- Support for nanotechnology research
Center for MEMS and Microsystems Technologies The mission of the CMMT at Georgia Institute of Technology is to advance the state-of-the-art in MEMS and Microsystems technologies. The CMMT creates and disseminates intellectual properties and human capital to the greater community interested in microsystems and microelectromechanical systems. The CMMT serves as a central entity for coordination of the microelectromechanical systems research and educational activities in the School of Electrical & Computer Engineering. The CMMT offers educational opportunities at all levels of study (undergraduates, graduate students, post-graduates) through a series of semester courses, short courses, and practical research related training activities. The Center offers opportunities for related businesses via prototyping, design, Center consulting services, research programs, short courses, and general MEMS processing services.
Microelectronic Acoustics Group 
Questions, comments, complaints, bugs about this page? We would like to hear from you.